| 型号 | 泵型号 | 抽气速率 | 极限压力 | 电机功率 | |||||
|---|---|---|---|---|---|---|---|---|---|
| 主泵 | 前级泵 | 主泵 | 前级泵 | ||||||
| Ⅰ | Ⅱ | L/s | Pa | Torr | Ⅰ | Ⅱ | |||
| ZJPS30-1 | JZP30 | SK1.5B | 30 | 3*102 | 2.25 | 1.1 | 4 | ||
| JZPS70-1 | JZP70 | 2SK3 | 70 | 3*102 | 2.25 | 1.1 | 7.5 | ||
| JZPS150-2 | JZP150 | 2SK6A | 150 | 3*102 | 2.25 | 2.2 | 11 | ||
| JZPS300-1 | JZP300 | SKA12 | 300 | 3*102 | 2.25 | 4 | 22 | ||
| JZPS600-1 | JZP600 | SKA25 | 600 | 3*102 | 2.25 | 7.5 | 37 | ||
| JZPS70-1 | JZP70 | JZP30 | SK1.5B | 70 | 100 | 0.75 | 1.1 | 1.1 | 4 |
| JZPS150-21 | JZP150 | JZP70 | 2SK3 | 150 | 40 | 0.3 | 2.2 | 1.1 | 7.5 |
| JZPS300-21 | JZP300 | JZP150 | 2SK6A | 300 | 40 | 0.3 | 4 | 2.2 | 11 |
| JZPS600-21 | JZP600 | JZP300 | SKA12 | 600 | 40 | 0.3 | 7.5 | 4 | 22 |
| JZPS1200-21 | JZP1200A | JZP600 | SKA25 | 1200 | 40 | 0.3 | 11 | 7.5 | 37 |
| JZPY30-1 | JZP30 | YK1.5A | 30 | 100 | 0.75 | 1.1 | 4 | ||
| JZPY70-1 | JZP70 | 2YK3 | 70 | 80 | 6*10-1 | 1.1 | 7.5 | ||
| JZPY150-1 | JZP150 | 2YK6A | 150 | 80 | 6*10-1 | 2.2 | 11 | ||
| JZPY300-1 | JZP300 | YK12A | 300 | 80 | 6*10-1 | 4 | 22 | ||
| JZPY6001 | JZP600 | YK25A | 600 | 80 | 6*10-1 | 7.5 | 37 | ||
| JZPY70-21 | JZP70 | JZP30 | YKA1.5 | 70 | 4 | 3*10-2 | 1.1 | 0.75 | 4 |
| JZPY150-21 | JZP150 | JZP70 | 2KY3 | 150 | 0.8 | 6*10-3 | 2.2 | 1.1 | 7.5 |
| JZPY300-21 | JZP300 | JZP150 | 2YK6A | 300 | 0.8 | 6*10-3 | 4 | 2.2 | 11 |
| JZPY600-21 | JZP600 | JZP300 | YK12A | 600 | 0.8 | 6*10-3 | 7.5 | 4 | 22 |
| JZPY1200-21 | JZP1200A | JZP600 | YK25A | 1200 | 0.8 | 6*10-3 | 11 | 7.5 | 37 |
| JZPY600-411 | JZP600 | JZP150 | 2H70A 2KY6A | 600 | 1*10-2 8*10-1 | 8*10-5 6*10-3 | 7.5 | 2.2 | 7.5 11 |
